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EPI2 Email Log
Tuesday, October 7, 2008
Re: Comment epi2 SNF 2008-10-07 10:12:42: Update
Deposited 4um on the chamber and used the standard Si "ethchcoat" recipe after. We inspected the dome after...it was clean.
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We have reserved the system everyday at 9:30am to do a dome inspection.
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