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EPI2 Email Log
Sunday, December 7, 2008
Problem epi2 SNF 2008-12-07 21:18:34: pressure stablization problem
After GE ETCH COAT, pressure was not stablized. I ran 5 wafers today and it happened every time. It also happened once at the end of the process. It seems like 76 torr doen't work.
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