Problem epi2 SNF 2008-12-11 18:26:19: Worse pressure problem

It is hard to stablize the pressure higher than 50 torr. Wafer transfer problems happened more often than before. 50 torr annealing is used for my process. Therefore, i found it unstable during the annealing. I think it will getting worse and eventuly we will not be able to do our low pressure deposition.