After my recipe run,
"load lock A stepper faild" error was happen.
I tryied to open LLA comannd but LLA status was going to "busy" and nothing happen.
I was looking for LL reset command but I can't find that.
After about 30 min wait, epi2 showed "Encoder on axis - LOAD LOCK A INDEXER reports a loss of 20043" error and LLA "busy" mode was released.
I was open LLA door manualy and took my wafer off.
After that I close LLA door manualy, LLA is back to "busy" mode and can't accept any command.
I can't do anything after this error.
Subscribe to:
Post Comments (Atom)
No comments:
Post a Comment