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EPI2 Email Log
Saturday, February 26, 2011
Re: Problem epi2 SNF 2011-02-26 00:57:59: LLA and LLB
homed both cassette elevators.
loaded a wafer from both loadlocks into the process chamber and then back into the loadloaks.
Don't know how both loadlocks could lose calibration...seems ok now.
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