Hello everyone,
Hope it's a happy tuesday for you. I was wondering if someone had experience dry etching Al2O3 from a fiji ALD chamber? I have some recipes, but am wondering what other people use and what etch rates they get, etc. Right now, I use BCL3/Cl2 on pquest, but am worried about the chloride and nasty residues left behind...
Thanks!
-Max
Subscribe to:
Post Comments (Atom)
No comments:
Post a Comment