Re: Question: Etch rate of Unannealed 400degC LTO with 6:1 BOE wet etch

you will find this webpage a useful reference:

http://snf.stanford.edu/Process/WetProcessing/WetER1.html

On Thu, Oct 18, 2012 at 4:30 PM, Kyunglok Kim <kyunglok@stanford.edu> wrote:

Dear labmembers,

I'd like to use 6:1 BOE to etch a 1um thick LTO deposited at 400degC.
If 6:1 BOE etch rate is too aggressive, I also have a plan to use 50:1 HF instead of it.
Would you please let me know the average etch rate of both of them?
I really appreciate your help!

Best,
Kyunglok Kim
PhD Candidate
Electrical Engineering
Stanford University