Anisotropic Etching of 3612

Hi All,

I'm looking for recipes to do a sputter etch of 3612, something anisotropic with an etch rate of around 300nm/min. Has anyone tried using Ar in DryTek4 or Ar in pquest to do this?

Thanks,

Robert Chen
Electrical Engineering Ph.D. Candidate
Harris MBE Group, Stanford University
http://robochen.web.stanford.edu