Hello Labmembers:
This is a reminder that on Friday, November 23rd, there will be no building heat or humidity control due to planned repair of a 14" steam flange. The repair, by Stanford facilities begins at 6:00am and is expected to be completed by 4:00pm. During this time there will be no temperature or humidity control in the Litho area. We strongly recommend that you postpone any Litho steps until the repairs are completed and the litho area returns to a normal, controlled state. This is so you can avoid any potential processing problems or unpredictable results due to the fluctuating temperature and humidity. If you choose to do litho processing, please expose and disposition a test wafer to check your process. Please make Coral entries if the ASML Stepper posts warnings regarding air or water temperature or call the SNF Duty phone at 650-521-7306. Thanks for your patience and understanding .
Your SNF Staff
This is a reminder that on Friday, November 23rd, there will be no building heat or humidity control due to planned repair of a 14" steam flange. The repair, by Stanford facilities begins at 6:00am and is expected to be completed by 4:00pm. During this time there will be no temperature or humidity control in the Litho area. We strongly recommend that you postpone any Litho steps until the repairs are completed and the litho area returns to a normal, controlled state. This is so you can avoid any potential processing problems or unpredictable results due to the fluctuating temperature and humidity. If you choose to do litho processing, please expose and disposition a test wafer to check your process. Please make Coral entries if the ASML Stepper posts warnings regarding air or water temperature or call the SNF Duty phone at 650-521-7306. Thanks for your patience and understanding .
Your SNF Staff
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