SF6 recipe at pquest

Hello labmembers,

 

Does anyone of labmembers and staff members know a proper F-based recipe

for etching GaAs with an oxide mask at a selectivity > 4:1?

It will be really appreciated if you recommend one of recipes

of which GaAs etch rate is a value you know, with the high selectivity.

 

Thank you.

 

- Sincerely, Seongjae.