Wednesday, November 28, 2012

Steam shutdown Saturday, December 1, 6 am to 4 pm

SNF Lab Members:

This is a reminder that there will be no steam in the building this
coming Saturday, December 1, due to an emergency repair to one of the
main steam distribution lines outside of the building.

Currently steam is schedule to go off at 6 a.m. and should be back on by
4 p.m. Jose Solarzano will be in communication with the steam shop and
will bring building systems back on line as soon as the work has been
completed.

During this time window, temperature control in the cleanroom will not
be very good and there will be no humidity control in the lithography
area. There are Extech temperature/humidity controllers near the ASML
and the SVG coat track that will give you an idea of how far temperature
has drifted.

Critical lithography operations and even critical wet etch operations
should likely be deferred until proper temperature control is restored.

Heating in the offices and domestic hot water will also be affected.

Let me know if you have any questions,

John

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