Tuesday, December 4, 2012

Re: GaAs etching in PQuest

hi Neil!
how's it be?! This guy sonny vo had a lot of amazing GaAs etches there. Just enable pquest, find a 'svo gaas etch' or anything with svo, load sample, hit run and you can say something like, 'i want my samples to turn into gold.' and after 45 minutes, you get your wish. Make sure to make eye contact with the machine when you say this. This is important. Active Pquest users know how emotional this machine can get. 
"Yusi Chen" <yusichen@stanford.edu>, a fellow Harris Group has been visiting the pawn shop regularly with his samples so connect with him.

$onny





On Tue, Dec 4, 2012 at 1:34 PM, Neil Dasgupta <dasgupta@stanford.edu> wrote:
Hi labmembers,

I am preparing a new process which involves etching features into GaAs.  I haven't worked much with GaAs in the past, and was hoping to benefit from the existing expertise.  I was planning to use P Quest, and was wondering if anybody has experience etching GaAs in this machine recently, and might be able to share recipes/etch rates (including selectivity for mask materials). I would like to etch on the order of 1 micron deep features.  Also, if you recommend any surface cleaning/pre-treatments before the etch, it would be greatly appreciated.

Thank you,
Neil Dasgupta
Prinz Group



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Regards,
Sonny

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Department of Applied physics, Stanford University
research group: http://snow.stanford.edu/index.html

626-216-4597


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