Hi All,
Before we go on vacation, I just wanted to ask if anyone had measured Step Profile for O2, CHF3 Oxide Etch on mrc? I need to have sloped Via Etch for contaminated process. Because next step is evaporative dep for lift off. Any other suggestions would also be helpful.
-Jyotindra
Tuesday, December 18, 2012
Subscribe to:
Post Comments (Atom)
No comments:
Post a Comment