Special EBEAM LAB Presentation
ALLEN–X 101 Auditorium
Thursday January 31, 2013, 12:00 – 1:30 PM
Single Digit Nanofabrication for Nanoscience
Dr. Deirdre Olynick
Staff Scientist, Nanofabrication Facility, Molecular Foundry,
University of California at Berkeley’s Lawrence Berkeley National Laboratory
Nanofabrication at single digit nano (SDN) resolution (below 10 nm) opens up new possibilities in nanoscience. SDN applications at the Molecular Foundry include nanofluidics for single molecular detection, optical imaging of materials far below the diffraction limit, and structured materials for efficient energy production.
Our group has made significant advances developing new materials and processes for patterning SDN features. I will highlight our work which combines “bottom-up” and “top-down” techniques and span areas such as novel dry development, SDN modulus characterization of resists, selective atomic layer deposition, double patterning, nanoimprint, and super selective, cryogenic dry etching. Challenges and opportunities will be discussed along with new applications.
Biography
Deirdre Olynick is a Staff Scientist at Lawrence Berkeley National Laboratory’s Molecular Foundry, one of five DOE Nanoscale User Centers. She received her Ph. D. degree in Materials Science and Engineering from the University of Illinois where she was a Fannie and John Hertz Fellow and awarded fellowship from the National Science Foundation and Department of Defense. She received her B.S. from North Carolina State University. Prior to coming to LBNL, she worked in the semiconductor industry including at Applied Material. In 1998, she joined Lawrence Berkeley National Laboratory (LBNL) as a staff scientist in nanofabrication, first at the Center for X-ray Optics and then at the Molecular Foundry. Her current research areas include resist materials, self-assembly, nanoscale plasma etching, nanoimprint lithography, and patterning for energy.
Hosted by James W. Conway
jwc@snf.stanford.edu
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