[labmembers] borrow ProTEK B3 for long time KOH etch

Dear labmembers,  

My process need a through-wafer KOH etch. From my experience, the unprotected front surface will be attacked. I am wondering if some of the groups have ProTEK B3, and I can borrow a little. I only need it for one wafer. We would like to pay for the portion. Thanks in advance. 

Best, 

Helen 

Helen Qiushi Ran
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Department of Electrical Engineering
Stanford University, Stanford, CA 94305.
Mobile: +1-650-796-1439
Email: qran@stanford.edu