Saturday, January 24, 2009
Comment epi2 SNF 2009-01-24 18:47:25: mechanical arm problem
i found that sometimes the wafer was not load properly back to the cassette in load lock B. it was sometimes a inch away or the edge was not sitting in the right direction. I guess the position of the arm is off a little bit. i ran 8 runs so far and found this happend 3 times.
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