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EPI2 Email Log
Thursday, January 22, 2009
Problem epi2 SNF 2009-01-22 19:16:54: Possible wafer handling problem
I ran 4 wafers in automatic mode (slots 2 to 5). When I unloaded the wafers, I noticed that the wafer in slot 3 was askew. It was slightly rotated compared to the other wafers.
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