skip to main
|
skip to sidebar
EPI2 Email Log
Monday, October 8, 2012
Re: Problem epi2 SNF 2012-10-08 12:23:50: wafer stuck in Ca A, LLA door cannot be closed
Did a global reset
manually moved wafer from Cha to LLB
No comments:
Post a Comment
Newer Post
Older Post
Home
Subscribe to:
Post Comments (Atom)
Problem Categories
HCl panel
chamber vacuum
scrubber
pressure control
throttle valve
gas change
hard drive
Data and Information
EPI 2 Process Logbook (New)
EPI 2 Discussion Group (New)
Archive
Archive
02/17 - 02/24 (1)
02/10 - 02/17 (11)
02/03 - 02/10 (8)
01/27 - 02/03 (7)
01/20 - 01/27 (8)
01/13 - 01/20 (10)
01/06 - 01/13 (43)
12/30 - 01/06 (2)
12/16 - 12/23 (11)
12/09 - 12/16 (16)
12/02 - 12/09 (21)
11/25 - 12/02 (39)
11/18 - 11/25 (8)
11/11 - 11/18 (26)
11/04 - 11/11 (27)
10/28 - 11/04 (27)
10/21 - 10/28 (15)
10/14 - 10/21 (12)
10/07 - 10/14 (27)
09/30 - 10/07 (29)
09/23 - 09/30 (20)
09/16 - 09/23 (12)
09/09 - 09/16 (24)
09/02 - 09/09 (13)
08/26 - 09/02 (22)
08/19 - 08/26 (40)
08/12 - 08/19 (23)
08/05 - 08/12 (17)
07/29 - 08/05 (19)
07/22 - 07/29 (32)
07/15 - 07/22 (21)
07/08 - 07/15 (13)
07/01 - 07/08 (7)
06/24 - 07/01 (21)
06/17 - 06/24 (24)
06/10 - 06/17 (25)
06/03 - 06/10 (16)
05/27 - 06/03 (27)
05/20 - 05/27 (21)
05/13 - 05/20 (24)
05/06 - 05/13 (21)
04/29 - 05/06 (35)
04/22 - 04/29 (21)
04/15 - 04/22 (23)
04/08 - 04/15 (31)
04/01 - 04/08 (21)
03/25 - 04/01 (4)
03/18 - 03/25 (8)
03/11 - 03/18 (15)
03/04 - 03/11 (17)
02/26 - 03/04 (25)
02/19 - 02/26 (13)
02/12 - 02/19 (18)
02/05 - 02/12 (17)
01/29 - 02/05 (9)
01/22 - 01/29 (5)
01/15 - 01/22 (9)
01/08 - 01/15 (3)
01/01 - 01/08 (1)
12/25 - 01/01 (3)
12/18 - 12/25 (1)
12/11 - 12/18 (13)
12/04 - 12/11 (26)
11/27 - 12/04 (15)
11/20 - 11/27 (25)
11/13 - 11/20 (18)
11/06 - 11/13 (25)
10/30 - 11/06 (24)
10/23 - 10/30 (25)
10/16 - 10/23 (31)
10/09 - 10/16 (24)
10/02 - 10/09 (11)
09/25 - 10/02 (24)
09/18 - 09/25 (9)
09/11 - 09/18 (21)
09/04 - 09/11 (6)
08/28 - 09/04 (16)
08/21 - 08/28 (28)
08/14 - 08/21 (16)
08/07 - 08/14 (25)
07/31 - 08/07 (15)
07/24 - 07/31 (15)
07/17 - 07/24 (14)
07/10 - 07/17 (13)
07/03 - 07/10 (7)
06/26 - 07/03 (24)
06/19 - 06/26 (12)
06/12 - 06/19 (6)
06/05 - 06/12 (26)
05/29 - 06/05 (22)
05/22 - 05/29 (21)
05/15 - 05/22 (26)
05/08 - 05/15 (28)
05/01 - 05/08 (25)
04/24 - 05/01 (27)
04/17 - 04/24 (26)
04/10 - 04/17 (25)
04/03 - 04/10 (26)
03/27 - 04/03 (25)
03/20 - 03/27 (25)
03/13 - 03/20 (31)
03/06 - 03/13 (36)
02/27 - 03/06 (34)
02/20 - 02/27 (28)
02/13 - 02/20 (23)
02/06 - 02/13 (17)
01/30 - 02/06 (30)
01/23 - 01/30 (41)
01/16 - 01/23 (16)
01/09 - 01/16 (22)
01/02 - 01/09 (27)
12/19 - 12/26 (3)
12/12 - 12/19 (24)
12/05 - 12/12 (26)
11/28 - 12/05 (24)
11/21 - 11/28 (15)
11/14 - 11/21 (28)
11/07 - 11/14 (16)
10/31 - 11/07 (25)
10/24 - 10/31 (24)
10/17 - 10/24 (11)
10/10 - 10/17 (24)
10/03 - 10/10 (22)
09/26 - 10/03 (12)
09/19 - 09/26 (16)
09/12 - 09/19 (25)
09/05 - 09/12 (15)
08/29 - 09/05 (23)
08/22 - 08/29 (7)
08/15 - 08/22 (13)
08/08 - 08/15 (15)
08/01 - 08/08 (6)
07/25 - 08/01 (13)
07/18 - 07/25 (31)
07/11 - 07/18 (20)
07/04 - 07/11 (11)
06/27 - 07/04 (14)
06/20 - 06/27 (18)
06/13 - 06/20 (15)
06/06 - 06/13 (31)
05/30 - 06/06 (21)
05/23 - 05/30 (19)
05/16 - 05/23 (14)
05/09 - 05/16 (15)
05/02 - 05/09 (24)
04/25 - 05/02 (18)
04/18 - 04/25 (5)
04/11 - 04/18 (27)
04/04 - 04/11 (20)
03/28 - 04/04 (25)
03/21 - 03/28 (31)
03/14 - 03/21 (12)
03/07 - 03/14 (16)
02/28 - 03/07 (14)
02/21 - 02/28 (27)
02/14 - 02/21 (18)
02/07 - 02/14 (15)
01/31 - 02/07 (18)
01/24 - 01/31 (21)
01/17 - 01/24 (25)
01/10 - 01/17 (14)
01/03 - 01/10 (6)
12/13 - 12/20 (7)
12/06 - 12/13 (15)
11/29 - 12/06 (18)
11/22 - 11/29 (14)
11/15 - 11/22 (19)
11/08 - 11/15 (27)
11/01 - 11/08 (24)
10/25 - 11/01 (21)
10/18 - 10/25 (12)
10/11 - 10/18 (9)
10/04 - 10/11 (14)
09/27 - 10/04 (14)
09/20 - 09/27 (17)
09/13 - 09/20 (5)
09/06 - 09/13 (14)
08/30 - 09/06 (10)
08/23 - 08/30 (9)
08/16 - 08/23 (24)
08/09 - 08/16 (18)
08/02 - 08/09 (8)
07/26 - 08/02 (9)
07/19 - 07/26 (7)
07/12 - 07/19 (7)
07/05 - 07/12 (21)
06/28 - 07/05 (14)
06/21 - 06/28 (9)
06/14 - 06/21 (30)
06/07 - 06/14 (25)
05/31 - 06/07 (22)
05/24 - 05/31 (5)
05/17 - 05/24 (37)
05/10 - 05/17 (19)
05/03 - 05/10 (21)
04/26 - 05/03 (15)
04/19 - 04/26 (7)
04/12 - 04/19 (21)
04/05 - 04/12 (16)
03/29 - 04/05 (20)
03/22 - 03/29 (8)
03/15 - 03/22 (12)
03/08 - 03/15 (15)
03/01 - 03/08 (20)
02/22 - 03/01 (33)
02/15 - 02/22 (19)
02/08 - 02/15 (23)
02/01 - 02/08 (21)
01/25 - 02/01 (11)
01/18 - 01/25 (21)
01/11 - 01/18 (15)
01/04 - 01/11 (10)
12/21 - 12/28 (1)
12/14 - 12/21 (8)
12/07 - 12/14 (23)
11/30 - 12/07 (22)
11/23 - 11/30 (8)
11/16 - 11/23 (24)
11/09 - 11/16 (15)
11/02 - 11/09 (20)
10/26 - 11/02 (28)
10/19 - 10/26 (20)
10/12 - 10/19 (27)
10/05 - 10/12 (27)
09/28 - 10/05 (23)
09/21 - 09/28 (19)
09/14 - 09/21 (19)
09/07 - 09/14 (17)
08/31 - 09/07 (19)
08/24 - 08/31 (18)
08/17 - 08/24 (19)
08/10 - 08/17 (10)
08/03 - 08/10 (25)
07/27 - 08/03 (22)
07/20 - 07/27 (20)
07/13 - 07/20 (15)
07/06 - 07/13 (35)
06/29 - 07/06 (23)
06/22 - 06/29 (9)
06/15 - 06/22 (11)
06/08 - 06/15 (16)
06/01 - 06/08 (12)
05/25 - 06/01 (26)
05/18 - 05/25 (31)
05/11 - 05/18 (26)
05/04 - 05/11 (13)
04/27 - 05/04 (12)
04/20 - 04/27 (20)
04/13 - 04/20 (12)
04/06 - 04/13 (12)
03/30 - 04/06 (6)
03/23 - 03/30 (13)
03/16 - 03/23 (10)
03/09 - 03/16 (27)
03/02 - 03/09 (32)
02/24 - 03/02 (35)
02/17 - 02/24 (27)
02/10 - 02/17 (21)
02/03 - 02/10 (24)
01/27 - 02/03 (17)
01/20 - 01/27 (17)
01/13 - 01/20 (23)
01/06 - 01/13 (11)
12/30 - 01/06 (6)
12/23 - 12/30 (1)
12/16 - 12/23 (7)
12/09 - 12/16 (21)
12/02 - 12/09 (11)
11/25 - 12/02 (8)
11/18 - 11/25 (5)
11/11 - 11/18 (7)
11/04 - 11/11 (12)
10/28 - 11/04 (5)
10/21 - 10/28 (11)
10/14 - 10/21 (2)
No comments:
Post a Comment